Thermal calibration of heated silicon atomic force microscope cantilevers

Brent A Nelson, William P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Abstract

This paper analyzes the accuracy and stability of calibration methodologies for heated silicon atomic force microscope cantilevers. The calibration techniques include Raman thermometry, comparison of the cantilever electrical characteristics with theory, and isothermal calibration on a hotplate. The various techniques offer tradeoffs between calibration time and calibration accuracy, where the best accuracy possible is with Raman thermometry, which calibrates the heater temperature to within 3-10% of the temperature rise, depending upon the temperature. The temperature calibrations are stable with storage time and cantilever usage, although a 'burn-in' period is usually required to stabilize the cantilever resistance.

Original languageEnglish (US)
Title of host publicationTRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
Pages607-610
Number of pages4
DOIs
StatePublished - 2007
Externally publishedYes
Event4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07 - Lyon, France
Duration: Jun 10 2007Jun 14 2007

Other

Other4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
CountryFrance
CityLyon
Period6/10/076/14/07

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Keywords

  • Heated atomic force microscopy
  • Microheater
  • Nanomanufacturing
  • Thermal cantilever

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

Cite this

Nelson, B. A., & King, W. P. (2007). Thermal calibration of heated silicon atomic force microscope cantilevers. In TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems (pp. 607-610). [4300203] https://doi.org/10.1109/SENSOR.2007.4300203