Temperature calibration of heated silicon atomic force microscope cantilevers

Brent A Nelson, W. P. King

Research output: Contribution to journalArticle

70 Citations (Scopus)

Abstract

This article presents calibration techniques for heated silicon atomic force microscope cantilevers and analyzes the accuracy of these techniques. A calibration methodology using Raman thermometry is presented and validated with heat transfer simulations and experimental measurements. Raman thermometry generates a calibration standard against which other techniques can be compared. Theoretical predictions of the cantilever temperature-dependent electrical properties do not by themselves provide accurate cantilever temperature calibration. Isothermal calibration is also insufficient. The temperature calibrations are stable with storage time and number of heating cycles, although an electrical 'burn-in' period is required to stabilize the cantilever response. These techniques for precise temperature calibration of heatable silicon cantilevers are required for applications where temperature must be carefully controlled, including surface science measurements and nano-manufacturing.

Original languageEnglish (US)
Pages (from-to)51-59
Number of pages9
JournalSensors and Actuators, A: Physical
Volume140
Issue number1
DOIs
StatePublished - Oct 1 2007
Externally publishedYes

Fingerprint

Silicon
Microscopes
microscopes
Calibration
silicon
temperature measurement
Temperature
temperature
burn-in
manufacturing
heat transfer
electrical properties
methodology
cycles
heating
Electric properties
predictions
Heat transfer
Heating
simulation

Keywords

  • Atomic force microscopy
  • Microcantilever
  • Microheater
  • Raman
  • Thermal sensors
  • Thermometry

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Instrumentation

Cite this

Temperature calibration of heated silicon atomic force microscope cantilevers. / Nelson, Brent A; King, W. P.

In: Sensors and Actuators, A: Physical, Vol. 140, No. 1, 01.10.2007, p. 51-59.

Research output: Contribution to journalArticle

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