Embedded piezoresistive microcantilever sensors: Materials for sensing hydrogen cyanide gas

Timothy L. Porter, Tim Vail, Michael Eastman, Ray Stewart, Jim Reed, William G Delinger

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of hydrogen cyanide gas. EPM sensors are small, MEMS-based devices consisting of a tiny piezoresistive microcantilever partially embedded into a "sensing material" designed to respond volumetrically when exposed to the desired analyte. These EPM sensors may be very small, operate on simple and inexpensive support electronics, are highly resistant to movement or shock, may be operated by hardwire connection or wirelessly in large numbers, and are capable of detecting many different analytes. In this study, we have used EPM sensors to detect hydrogen cyanide gas. Preliminary results indicate that the EPM sensors provide a fast response (less than 5 seconds) to levels of HCN that may be lethal to humans.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
Pages149-153
Number of pages5
Volume915
StatePublished - 2006
Event2006 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: Apr 18 2006Apr 20 2006

Other

Other2006 Materials Research Society Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/18/064/20/06

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Hydrogen Cyanide
Cyanides
Gases
Hydrogen
Sensors
MEMS
Electronic equipment

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Porter, T. L., Vail, T., Eastman, M., Stewart, R., Reed, J., & Delinger, W. G. (2006). Embedded piezoresistive microcantilever sensors: Materials for sensing hydrogen cyanide gas. In Materials Research Society Symposium Proceedings (Vol. 915, pp. 149-153)

Embedded piezoresistive microcantilever sensors : Materials for sensing hydrogen cyanide gas. / Porter, Timothy L.; Vail, Tim; Eastman, Michael; Stewart, Ray; Reed, Jim; Delinger, William G.

Materials Research Society Symposium Proceedings. Vol. 915 2006. p. 149-153.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Porter, TL, Vail, T, Eastman, M, Stewart, R, Reed, J & Delinger, WG 2006, Embedded piezoresistive microcantilever sensors: Materials for sensing hydrogen cyanide gas. in Materials Research Society Symposium Proceedings. vol. 915, pp. 149-153, 2006 Materials Research Society Spring Meeting, San Francisco, CA, United States, 4/18/06.
Porter TL, Vail T, Eastman M, Stewart R, Reed J, Delinger WG. Embedded piezoresistive microcantilever sensors: Materials for sensing hydrogen cyanide gas. In Materials Research Society Symposium Proceedings. Vol. 915. 2006. p. 149-153
Porter, Timothy L. ; Vail, Tim ; Eastman, Michael ; Stewart, Ray ; Reed, Jim ; Delinger, William G. / Embedded piezoresistive microcantilever sensors : Materials for sensing hydrogen cyanide gas. Materials Research Society Symposium Proceedings. Vol. 915 2006. pp. 149-153
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