Embedded piezoresistive microcantilever sensors: Materials for sensing hydrogen cyanide gas

Timothy L. Porter, Tim Vail, Michael Eastman, Ray Stewart, Jim Reed, William Delinger

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of hydrogen cyanide gas. EPM sensors are small, MEMS-based devices consisting of a tiny piezoresistive microcantilever partially embedded into a "sensing material" designed to respond volumetrically when exposed to the desired analyte. These EPM sensors may be very small, operate on simple and inexpensive support electronics, are highly resistant to movement or shock, may be operated by hardwire connection or wirelessly in large numbers, and are capable of detecting many different analytes. In this study, we have used EPM sensors to detect hydrogen cyanide gas. Preliminary results indicate that the EPM sensors provide a fast response (less than 5 seconds) to levels of HCN that may be lethal to humans.

Original languageEnglish (US)
Title of host publicationNanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications
PublisherMaterials Research Society
Pages149-153
Number of pages5
ISBN (Print)9781558998711
DOIs
StatePublished - Jan 1 2006
Event2006 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: Apr 18 2006Apr 20 2006

Publication series

NameMaterials Research Society Symposium Proceedings
Volume915
ISSN (Print)0272-9172

Other

Other2006 Materials Research Society Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period4/18/064/20/06

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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  • Cite this

    Porter, T. L., Vail, T., Eastman, M., Stewart, R., Reed, J., & Delinger, W. (2006). Embedded piezoresistive microcantilever sensors: Materials for sensing hydrogen cyanide gas. In Nanostructured Materials and Hybrid Composites for Gas Sensors and Biomedical Applications (pp. 149-153). (Materials Research Society Symposium Proceedings; Vol. 915). Materials Research Society. https://doi.org/10.1557/proc-0915-r04-09