Embedded piezoresistive microcantilever sensors: Materials for sensing chemical and biological analytes

Timothy L. Porter, William G Delinger, Robert L. Gunter

Research output: Chapter in Book/Report/Conference proceedingConference contribution

5 Scopus citations

Abstract

We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of volatile organic compounds, industrial chemicals, and biological molecules. The EPM design incorporates a tiny piezoresistive microcantilever embedded or partially embedded into a material sensing layer. The sensing layer material is chosen so as to react to the desired analyte(s), and undergo a minute volumetric or vertical shift in dimension. In the present paper, we present results on the sensing of various VOC's, vaccinia virus in solution, carbon tetrachloride in vapor, and osmolality in human subjects.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium Proceedings
EditorsD. LaVan, M. McNie, C.S. Ozkan, S. Prasad
Pages265-269
Number of pages5
Volume872
StatePublished - 2005
Event2005 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: Mar 28 2005Apr 1 2005

Other

Other2005 Materials Research Society Spring Meeting
CountryUnited States
CitySan Francisco, CA
Period3/28/054/1/05

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

Cite this

Porter, T. L., Delinger, W. G., & Gunter, R. L. (2005). Embedded piezoresistive microcantilever sensors: Materials for sensing chemical and biological analytes. In D. LaVan, M. McNie, C. S. Ozkan, & S. Prasad (Eds.), Materials Research Society Symposium Proceedings (Vol. 872, pp. 265-269). [J13.18]