Embedded piezoresistive microcantilever sensors: Materials for sensing chemical and biological analytes

Timothy L. Porter, William Delinger, Robert L. Gunter

Research output: Contribution to journalConference article

5 Scopus citations

Abstract

We have used embedded piezoresistive microcantilever (EPM) sensors in the detection of volatile organic compounds, industrial chemicals, and biological molecules. The EPM design incorporates a tiny piezoresistive microcantilever embedded or partially embedded into a material sensing layer. The sensing layer material is chosen so as to react to the desired analyte(s), and undergo a minute volumetric or vertical shift in dimension. In the present paper, we present results on the sensing of various VOC's, vaccinia virus in solution, carbon tetrachloride in vapor, and osmolality in human subjects.

Original languageEnglish (US)
Article numberJ13.18
Pages (from-to)265-269
Number of pages5
JournalMaterials Research Society Symposium Proceedings
Volume872
DOIs
StatePublished - Jan 1 2005
Event2005 Materials Research Society Spring Meeting - San Francisco, CA, United States
Duration: Mar 28 2005Apr 1 2005

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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