Electrical, thermal, and mechanical characterization of silicon microcantilever heaters

Jungchul Lee, Thomas Beechem, Tanya L. Wright, Brent A Nelson, Samuel Graham, William P. King

Research output: Contribution to journalArticle

164 Citations (Scopus)

Abstract

Silicon atomic force microscope (AFM) cantilevers having integrated solid-state heaters were originally developed for application to data storage, but have since been applied to metrology, thermophysical property measurements, and nanoscale manufacturing. These applications beyond data storage have strict requirements for mechanical characterization and precise temperature calibration of the cantilever. This paper describes detailed mechanical, electrical, and thermal characterization and calibration of AFM cantilevers having integrated solid-state heaters. Analysis of the cantilever response to electrical excitation in both time and frequency domains aids in resolving heat transfer mechanisms in the cantilever. Raman spectroscopy provides local temperature measurement along the cantilever with resolution near 1 μm and 5°C and also provides local surface stress measurements. Observation of the cantilever mechanical thermal noise spectrum at room temperature and while heated provides insight into cantilever mechanical behavior and compares well with finite-element analysis. The characterization and calibration methodology reported here expands the use of heated AFM cantilevers, particularly the uses for nanomanufacturing and sensing.

Original languageEnglish (US)
Pages (from-to)1644-1655
Number of pages12
JournalJournal of Microelectromechanical Systems
Volume15
Issue number6
DOIs
StatePublished - Dec 2006
Externally publishedYes

Fingerprint

Microscopes
Calibration
Silicon
Data storage equipment
Thermal noise
Stress measurement
Surface measurement
Temperature measurement
Raman spectroscopy
Thermodynamic properties
Heat transfer
Finite element method
Temperature
Hot Temperature

Keywords

  • Heated cantilever
  • Measurement
  • Microactuators
  • Microelectromechanical devices
  • Microsensors
  • Raman spectroscopy
  • Stress
  • Temperature calibration

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

Cite this

Electrical, thermal, and mechanical characterization of silicon microcantilever heaters. / Lee, Jungchul; Beechem, Thomas; Wright, Tanya L.; Nelson, Brent A; Graham, Samuel; King, William P.

In: Journal of Microelectromechanical Systems, Vol. 15, No. 6, 12.2006, p. 1644-1655.

Research output: Contribution to journalArticle

Lee, Jungchul ; Beechem, Thomas ; Wright, Tanya L. ; Nelson, Brent A ; Graham, Samuel ; King, William P. / Electrical, thermal, and mechanical characterization of silicon microcantilever heaters. In: Journal of Microelectromechanical Systems. 2006 ; Vol. 15, No. 6. pp. 1644-1655.
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